? Simple and compact direct drive rotary
? High stiffness large diameter ball bearing
? Precision glass scale for positional accuracy
? Ceramic servo motors for high speed & resolution
? Vacuum compatible versions available
Construction Features:
Direct Drive:
(2) or (4) HR2 Ceramic Servo Motors
(2) HR2 motors provide .34 Nm torque
(4) HR2 motors provide .68 Nm torque
Encoder:
Rotary Glass Scale with 20μm grating pitch
Standard Resolution of 327,680 ppr (19.17μrad)
Optional Resolution 2,097,152 ppr (3μrad)
Bearing:
6075 N dynamic load rating
(Stage specs based on max load rating of 22kg
Performance Specifications:
Maximum Velocity: 80 RPM
Encoder Resolution: 19.17μrad
Encoder Accuracy: 40μrad (8.25 arc seconds)
Position Repeatability: ±40μrad (±8.2 arc seconds)
Maximum Load: 22 kg
Maximum Torque .68 Nm
Radial Bearing Run-out 5μm
